Facilities
設備
簡介：
The redENERGY™ G3 fiber laser platform uses SPI’s innovative PulseTune technology that offers the OEM integrator highly flexible control over pulse width and peak power for deployment in multiple applications. The unique PulseTune function on the SM models enables market-leading repetition rates whilst maintaining peak power threshold.
規格：
1、Peak Emission wavelength: 1062 ± 3 nm
2、Modes of operation: Pulsed/ CWM
3、Minimum specifications: 12W / 6kW
4、Minimum Pulse Energy @ PRF0: 0.4 mJ
5、Full power range: 30 – 500 kHz
6、Reduced power range: 1 – 30 kHz
7、Modulation range in CW: Up to 100 kHz
8、Output power stability (typical): ≤ 5%
9、Beam Diameter, nominal: 0.8 – 7.2mm with selected BET option
10、M²: ≤ 1.3
儀器廠牌/型號：G3 SM Series 12W Pulsed Fiber Laser
相關連結：https://old.mjlinc.com/bbs/filebox/product/20091230135016.pdf
簡介：
The beam quality, high repetition rate and high output power of AVIA lasers combine to minimize the heat-affected zone in micromachining applications. These characteristics, plus their proven reliability and low cost of ownership make AVIA lasers suitable for a wide range of demanding, high-precision processing tasks. These include via drilling, silicon wafer sawing and scribing, solar cell manufacturing and electronic package singulation.
規格：
1、Wavelength: 355 nm
2、Pulse Repetition Rate: Single-shot to 100 kHz
3、Pulse Width: <30 ns up to 60 kHz
4、Pulse-to-Pulse Stability: <5% rms up to 60 kHz
5、Average Output Power: >10W @ 60 kHz
6、Polarization Ratio: >100:1 horizontal
7、Warm-up Time: <10 minutes
8、Spatial Mode: TEM00 (M2 <1.3)
9、Beam Divergence: <0.3 mrad
10、Beam Diameter: 3.5 mm @ 1/e2
儀器廠牌/型號：AVIA 355-X
相關連結：https://www.coherent.com/downloads/AVIA-X_DS_dis.pdf
簡介：
Solid-state, Q-switched laser featuring superior optical performance at 532 nm and the choice of 7W, 8W or 14W of output power. Applications include thin-film patterning (e.g. flat panel display, solar cells), trimming, cutting, dicing, drilling of semiconductor materials, and marking.
規格：
1、Average Power (W): 7 at 30 kHz
2、Pulse Repetition Rate (kHz)(single-shot): up to 100
3、Recommended Power Range (%) : 80 to 100
4、Pulse Duration (nsec): <20
5、Pulse Energy Stability (%)(rms): <2
6、Beam Parameters (nominal): 0.23 mm and <4.2 mrad
7、Circularity3: >90%
8、Spatial Mode: TEM00
9、Output Power Stability (8h/±3°): ±2%
10、Maximum Heat Load (W): <300
11、Static Alignment: ±0.2 mm, ±2 mrad
12、Maximum Warm-Up Times : <20 minutes cold start
<5 minutes from warm start
相關連結：
https://www.coherent.com/downloads/MATRIX1064&532_DSrevC_0211_1.pdf
簡介：
The innovative features of the redPOWER® R4 include Pulse Shape Equalisation (PSE) and closed loop control, giving class leading power stability and performance, even under the stress of reflections from bright metals. This allows the redPOWER R4 to produce highly repeatable results for years of continuous operation without maintenance in high accuracy applications, such as medical device production and metal 3D printing.
1、Central emission wavelength: 1070+/-10nm
2、Mode of operation: ≧200W
3、Output power variation : 連續(CW)及調控(modulated)出光
4、Red pilot laser: ≧100 kHz
5、Pulse Characteristics: ≧90%
6、Maximun modulation rate: < 1%
7、Pulse to pulse energy variation: < 0.5%
8、Minimum pulse width: <6 mm
9、Output Beam Characteristics: <1.3
相關連結：
https://www.coherent.com/downloads/MATRIX1064&532_DSrevC_0211_1.pdf
CO2雷射
簡介：
Maximum power and performance from an air-cooled CO2 laser is the drive behind our ti Series technology. Synrad’s ti Series lasers use a patented hybrid-unstable resonator design to create a compact laser with excellent beam quality focused to the smallest achievable spot size, delivering the maximum power density on a work surface. The high performance RF circuitry designed specifically to match its compact resonator delivers fast rise times with outstanding square-wave performance. High power, fast pulsing capabilities and exceptional optical quality are ideally suited for applications where rapid scanning or pulsing of the laser beam is required. The result is faster processing speeds, higher resolution and optimized quality for cutting, marking and engraving applications.
1、Output Specifications: 10.6 µm
2、Wavelength，µm: 10.55-10.68
3、Power Output: 60 W
4、Power Stability: ±7%
5、Mode Quality，M2: ≤1.2
6、Ellipticity: <1.2
7、Polarization: Linear
8、Extinction Ratio:>100:1
相關連結：
薄膜製程，適用於電子、電機、機械、材料等研究領域。原理根據離子濺射原理。利用電場使兩極間產生電子，這些加速電子與腔體中己預先充入的惰性氣體碰撞，這些帶正電的粒子會受陰極(靶材)吸引而撞擊陰極，入射離子受到電場作用獲得動量，撞擊靶材表面的原子，沉積在基板上形成薄膜。
規格：
1、真空系統
2、靶材直徑 : 2″
3、DC Power : 1000 W，RF Power : 400 W
4、300 W 射頻電漿電源產生器一組
5、直流電漿電源產生器兩組
6、氣體流量控制器 : Ar-100/cc，O2-20/cc，N2-20/cc
儀器廠牌/型號：
相關連結：https://1066802.u-nov.com/
簡介：
Choose the LAMBDA 35 for measurements on liquids, solids, pastes and powder samples and regulatory tests requiring variable bandwidths.
規格：
1、Range: 190 nm – 1100 nm
2、Bandwidth: 0.5 nm – 4 nm (variable)
3、Integrating sphere option
儀器廠牌/型號：LAMBDA 35
相關連結：https://www.perkinelmer.com/default.xhtml
簡介：
可對於可撓式面板材料進行其撓曲疲勞性測試，並且量測電壓電流變化量。
規格：
1、電源：110 V/5 A/50~60 Hz
2、氣壓：0.7~9.9 kg/cm2
3、可調整行程：30 mm
4、計數速度：60 cps或200cps以下
5、計數次數：999 次
6、試片可夾持尺寸：L「35 mm~80 mm」、W「10 mm~150 mm」、H「0.05 mm~6 mm」
儀器廠牌/型號：BT-3580
相關連結：https://www.cst.org.tw
簡介：
Customizable Optics and Lighting System
Reflected Light Illuminator
The reflected light illuminator provides a variety of observation methods such as BF (bright field), BF/DF (dark field) or DIC (Differential Interference Contrast) to meet all researchers’ needs.
Combined Switch for BF/DF and ND Filter
With the BF/DF converter switch on the front, it is easier to change observation modes as well as the interlocking ND filter, protecting observers’ eyes against dramatic changes of brightness.
A Set of Polarizer and Analyser Filters
A combined polarizer and analyzer filter set helps you to switch from the DIC/POL to other observation modes quickly and easily.
In addition, the polarizer and analyzer are designed as sliders and are accessible from either side of the microscope.
Optimum DIC provides the highest image quality
Using a DIC slider with a single prism, Huvitz Nomarski DIC observation mode offers easy switching to other observation modes and facilitates observations on any range of magnifications because the position of the DICprismisnot changed.
規格：
1、德國130萬高畫素數位CCD
2、Infinity-Corrected Optical System
3、可選擇的上、下光源（12V 100W halogen）
4、可選擇的觀察模式：明視野、暗視野、DIC
5、Coarse: 17.7 mm/revolution
6、Fine: 0.1 mm/revolution (1 µm scale)
7、HM-LH100：12V 100W鹵素燈
儀器廠牌/型號：HRM-300
相關連結：https://www.emtech.com.tw/Huvitz-HRM.html
簡介：
The PM100D is the cornerstone of Thorlabs’ optical power and energy meter consoles. The console (and sensor, sold separately) is ideal for use as a CW and pulsed laser power meter, incoherent optical source power meter, general light power meter, fiber power meter, and more. The PM100D is compatible with more than 25 photodiode, slim photodiode, integrating sphere, fiber, thermal, and pyroelectric sensors designed for use from the UV to the Mid-IR.
規格：
1、Battery: LiPolymer 3.7 V 1300 mAh
2、Charger/DC Input: 5 V/1 A
3、Dimensions (L×W×H): 180 mm × 105 mm × 38 mm
4、Weight:<0.5 kg
5、Mounting Options: Kickstand; 1/4”-20 Post Thread
6、Operating Temperature: 0 to 40 °C
7、Storage Temperature: -40 to 70 °C
儀器廠牌/型號：PM100D
相關連結：https://www.thorlabs.hk/thorproduct.cfm?partnumber=PM100D
簡介：
四點探針常用來量測薄片電阻的工具，只要在其中兩個探針間加上固定之電流，並同時量測另外兩個探針間之電壓差值，即可計算出薄膜電阻值。
規格：
1、Sample Size: ~ 12″
2、Square/Round Chuck Selectable
3、Z Up/Down: 30mm
4、Z Resolution: 20um
5、1ea 4 Point Head
6、Probe Head
儀器廠牌/型號：SR-H1000C
相關連結：https://www.probestation.tw/category-4-Point-Prober-pro-F.html
The Ulvac Technology MILA 3000 Rapid Thermal Annealing (RTA) vacuum furnace is a programmable tabletop furnace for high temperature materials testing and analysis.
儀器廠牌/型號：MILA-3000
共同管理設備
最新兼具-超高解析/分析能力之完美機型,特別適用於導電性差/敏感/生物試片,同時又具備熱場的大又穩定的分析電流,適用於日後之各種應用
規格：
1、1.0 nm ( 加速電壓15KV )、1.5 nm ( 加速電壓 1KV )
2、倍率: 25 to 1,000,000×
3、加速電壓: 0.5 to 30 kV
4、探測電流:A few pA to 200 nA
5、移動範圍: X軸: 70mm、Y軸: 50 mm、旋轉: 360度、Z軸: 1.5 to 25 mm。
6、載台種類:全範圍eucentric goniometer載台最大規格 長25 mm 高1cm。
儀器廠牌/型號：JSM-7600F FESEM / JEOL Ltd.
相關連結：
https://pic.npust.edu.tw/files/15-1163-20185,c82-1.php?Lang=zh-tw